发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device includes an insulator layer, and an n-channel MIS transistor having an n channel and a pMIS transistor having a p channel which are formed on the insulator layer, wherein the n channel of the n-channel MIS transistor is formed of an Si layer having a uniaxial tensile strain in a channel length direction, the p channel of the p-channel MIS transistor is formed of an SiGe or Ge layer having a uniaxial compressive strain in the channel length direction, and the channel length direction of each of the n-channel MIS transistor and the p-channel MIS transistor is a <110> direction.
申请公布号 US8008751(B2) 申请公布日期 2011.08.30
申请号 US20070950716 申请日期 2007.12.05
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 IRISAWA TOSHIFUMI;TAKAGI SHINICHI;SUGIYAMA NAOHARU
分类号 H01L29/04 主分类号 H01L29/04
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