| 摘要 |
In an XY table for use in a bonding apparatus, a Y-direction motor has a Y-direction movable memberincluding a movable arm movable in X and Y directions together with the table, formed as a fiber-reinforced plastic pipe with a rectangular cross section extending in the Y direction with one end thereof being fixed to the table and, in each short side surface, provided with anopening elongated in the Y direction, and an annular drive coil inserted into the opening to be attached to the movable arm and partially protruding from the opening in the width direction of the movable arm. This allows the bonding apparatus to be operated at high speed.
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