SCANNING PROBE MICROSCOPE HAVING NANOTOME

摘要

FIELD: physics. ^ SUBSTANCE: scanning probe microscope with a nanotome has a basic element on which there is a die holder with a holder interfaced with a first drive, a sample holder with a sample interfaced with a second drive and a scanning unit which can be interfaced with the sample. The first drive has a single-coordinate (coordinate Y) which moves die towards the sample. The second drive has one coordinate (coordinate X) which moves the sample holder with the sample perpendicular to coordinate Y. ^ EFFECT: high measurement accuracy and broader functional capabilities of the device. ^ 21 cl, 18 dwg