| 发明名称 |
GRAPHITE CRUCIBLE OF A NEW FORM FOR LARGE CALIBER GAAS SINGLE CRYSTAL |
| 摘要 |
<p>PURPOSE: A graphite insulating material of a GaAs quartz crucible is provided to improve the lifetime of a graphite susceptor by reducing physical impact applied to the graphite susceptor. CONSTITUTION: A quartz crucible support stand is connected to a rotary motor. The quartz crucible receives GaAs solutions and boron oxide. A graphite susceptor(1) is cylindrical and insulates the quartz crucible. A graphite heater generates heat due to electric resistance around the graphite susceptor. A lengthwise gap(2) is formed on the graphite heater.</p> |
| 申请公布号 |
KR20110095780(A) |
申请公布日期 |
2011.08.25 |
| 申请号 |
KR20100015431 |
申请日期 |
2010.02.19 |
| 申请人 |
NEOSEMITECH CORPORATION |
发明人 |
KIM, KYUNH SU;KIM, JAE SIK;JUNG, HYUN SUK;OH, MYUNG HWAN |
| 分类号 |
C30B15/14;C01B31/04;C30B15/10;C30B29/42 |
主分类号 |
C30B15/14 |
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