| 摘要 |
PROBLEM TO BE SOLVED: To provide a test head that can suppress bending of a probe card. SOLUTION: The test head 40 includes: a test head body 50 having a frame 51; an interface device 60 electrically connecting the probe card 20 and test head body 50 to each other; and a brake unit 80 interposed between the probe card 20 and frame 51, and transmitting pressure F, applied to the probe card 20, to the frame 51. COPYRIGHT: (C)2011,JPO&INPIT |
