发明名称 APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a substrate, wherein substrates are continuously produced to increase the productivity of the substrates, thereby preventing the substrates from being contaminated by the air. SOLUTION: The apparatus for manufacturing the substrate includes: a first chamber 200 supplying an insulating layer 111; a second chamber 300 including a roughening forming roller 310 roughening at least one side of the insulating layer 111 supplied from the first chamber 200, an evaporator 320 depositing a metal layer 112 on the roughened insulating layer 111, and a pressing roller 330 pressing the insulating layer 111 and the metal layer 112; and a third chamber 400 storing the insulating layer 111 including the metal layer 112 formed thereon, the insulating layer 111 being taken out from the second chamber 300. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011166098(A) 申请公布日期 2011.08.25
申请号 JP20100097556 申请日期 2010.04.21
申请人 SAMSUNG ELECTRO-MECHANICS CO LTD 发明人 SHIN DONG JOO;LEE CHOON KEUN;LIM SUNG TAEK
分类号 H05K3/00;H05K3/14;H05K3/38;H05K3/46 主分类号 H05K3/00
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