VACUUM PROCESSING DEVICE

摘要

Disclosed is a vacuum processing device that can secure efficient maintenance properties and can balance heating and cooling to hold an electrode for vacuum processing at a particular temperature range. A heating unit that heats a substrate (5) for being processed is provided to the interior of an anode electrode (7). The heating unit comprises rod-shaped heaters (31) provided parallel to each other. Tube-shaped cooling units (32) that cool the anode electrode (7) are also provided to the interior of the anode electrode (7). The cooling units (32) comprise cooling tubes (32) that are provided adjacent and parallel to each other along the outside of each heater (31) and that can circulate a cooling medium introduced inside and then discharge the cooling medium to the outside. In the cooling tubes (32), an introduction section (32a) and a discharge section (32b) for the cooling medium are provided localized at one end of the anode electrode (7). Also, the direction of flow of cooling medium is caused to be the opposite between adjacent pairs of cooling tubes (32).