| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin angular velocity sensor. <P>SOLUTION: The angular velocity sensor 1 has: a vibrator section 101 containing a plurality of vibration sections actuated by the same drive signal in a first surface in two directions which are not parallel; and a frame body 102 supporting the vibrator section. The sensor is equipped with: a sensor element 100 which generates the signals corresponding to angular velocities around a first axis and a second axis along the first surface in predetermined two directions and to angular velocity around a third axis in the direction which intersects perpendicularly with the first surface; a self-excited oscillation circuit 201 which outputs the drive signal; a controller 200 which has a detection circuit outputting the angular velocities around the first, second and third axes based on the signal corresponding to each angular velocity; and a circuit board 400 having the sensor element and the controller mounted thereon. <P>COPYRIGHT: (C)2011,JPO&INPIT |
