| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small and thin inertia sensor with a high force detection sensitivity, capable of measuring a wide range of magnitude of force. <P>SOLUTION: The inertia sensor is equipped with: a fixed portion 6 sequentially juxtaposed in an identical plane along a direction perpendicular to a force detection axis 20 direction; a movable portion 7; and a hinge portion 8 coupling the fixed portion 6 and a facing one end of the movable portion 7, and rocking the movable portion 7 in the detection axis 20 direction. In a plane configured at the fixed portion 6 and the movable portion 7, provided is a piezoelectric vibrating element 10 having one end fixed to the fixed portion 6 and the other end fixed to a part near a free end 7a located facing the hinge portion 8 of the movable portion 7, being spaced from a side of the movable portion 7 and linearly extended in parallel therewith, wherein an acute angle is formed by a longitudinal direction of the piezoelectric vibrating element 10 and the direction perpendicular to the force detection axis 20 direction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
