发明名称 TUNING FORK TYPE PIEZOELECTRIC VIBRATION PIECE AND PIEZOELECTRIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To improve a Q value of a tuning fork type piezoelectric vibration piece and to downsize it. <P>SOLUTION: The tuning fork type piezoelectric vibration piece 11 is equipped with: a pair of vibration arms 13, 14 which extend from a base 12 and are tapered toward a front end; groove portions 15, 16 formed on the rear and front main surfaces thereof; excitation electrodes 23-26 formed on the main surface and side surface of the vibration arms; and wide weight portions 27, 28 formed on the front ends of the vibration arms respectively. The weight portions each have a tapered portion 17a in which width increases from a coupling portion with the vibration arms to the front end, and a constant width portion 17b on the front side therefrom. The groove portions are formed so as to extend the front end up to the inside of the weight portions. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011166324(A) 申请公布日期 2011.08.25
申请号 JP20100024892 申请日期 2010.02.05
申请人 SEIKO EPSON CORP 发明人 TANAYA HIDEO
分类号 H03H9/19;H01L41/09;H01L41/18;H03H9/215 主分类号 H03H9/19
代理机构 代理人
主权项
地址