发明名称 PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND MANUFACTURING DEVICE FOR DISPLAY ELEMENT
摘要 PROBLEM TO BE SOLVED: To form a pattern so that unevenness may be inconspicuous. SOLUTION: A pattern forming device includes a first pattern coating portion for coating a substrate with a first pattern and a second pattern coating portion for coating the substrate with a second pattern, and in the second pattern coating portion, the second pattern is coated such that a part of the first pattern and a part of the second part 2 overlap in a direction intersecting a conveying direction of the substrate. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011165955(A) 申请公布日期 2011.08.25
申请号 JP20100027802 申请日期 2010.02.10
申请人 NIKON CORP 发明人 NIWA TATSUO;MIYAJI AKIRA
分类号 H05K3/10;B05C1/02;B05D3/00;H01L51/50;H05B33/10;H05K3/20 主分类号 H05K3/10
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