摘要 |
PROBLEM TO BE SOLVED: To form a pattern so that unevenness may be inconspicuous. SOLUTION: A pattern forming device includes a first pattern coating portion for coating a substrate with a first pattern and a second pattern coating portion for coating the substrate with a second pattern, and in the second pattern coating portion, the second pattern is coated such that a part of the first pattern and a part of the second part 2 overlap in a direction intersecting a conveying direction of the substrate. COPYRIGHT: (C)2011,JPO&INPIT
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