SULFONAMIDE-CONTAINING PHOTORESIST COMPOSITIONS AND METHODS OF USE
摘要
Provided are sulfonamide-containing photoresist compositions for use in lithographic processes that have improved properties for high resolution, low blur imaging. Also provided are alcohol- soluble photoresists for resist-on-resist applications. The sulfonamide- containing photoresist compositions of the present invention include positive-tone photoresist compositions that have sulfonamide-substituted repeat units with branched linking group as shown in Formula (I).
申请公布号
WO2011101260(A2)
申请公布日期
2011.08.25
申请号
WO2011EP51565
申请日期
2011.02.03
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;IBM UNITED KINGDOM LIMITED;CENTRAL GLASS CO LTD;SANDERS, DANIEL, PAUL;FUJIWARA, MASAKI;TERUI, YOSHIHARU