| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas introduction device and a method of introducing gas without sucking-in a particle when introducing a purge gas within an FOUP and capable of reducing the pressure within the FOUP and reducing the oxygen concentration and humidity at low cost. SOLUTION: Between a gas introduction valve of the FOUP and a gas supply section of a vacuum vessel, a seal ring to form a channel of the gas is provided to prevent sucking of particles and a check valve of the gas introduction valve is caused to communicate with the FOUP and the vacuum vessel by a push pin and vacuum evacuation and gas introduction are repeated several times. COPYRIGHT: (C)2011,JPO&INPIT
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