| 摘要 |
An acceleration sensor includes a substrate, and a plurality of acceleration detection units supported by the substrate. Each of the plurality of acceleration detection units has a torsion beam supported by the substrate and distorted about a torsion axis line; a detection frame supported by the torsion beam so as to be rotatable about the torsion axis line; a detection electrode formed on the substrate so as to face the detection frame; a link beam supported by the detection frame at a position on an axis line deviated from the torsion axis line when seen in plane; and an inertia mass body supported by the link beam so as to be displaceable in a thickness direction of the substrate. The plurality of acceleration detection units include first and second acceleration detection units. The first and second acceleration detection units are disposed side by side along a direction of the first torsion axis line. Thereby, a highly accurate acceleration sensor that suppresses a vibration with a high frequency and a high acceleration can be obtained.
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