| 摘要 |
Device for generating a plasma discharge near a substrate for patterning the surface of the substrate, comprising a first electrode having a first discharge portion and a second electrode having a second discharge portion, a high voltage source for generating a high voltage difference between the first and the second electrode, and positioning means for positioning the first electrode with respect to the substrate. The device is further provided with an intermediate structure that is, in use, arranged in between the first electrode and the substrate while allowing for positioning the first electrode with respect to the substrate. |
| 申请人 |
VISION DYNAMICS HOLDING B.V.;BLOM, PAULUS PETRUS MARIA;STEVENS, ALQUIN ALPHONS ELISABETH;HUIJBREGTS, LAURENTIA JOHANNA;DE HAAN, HUGO ANTON MARIE;VAN SCHIJNDEL, ANTONIUS HUBERTUS;TE SLIGTE, EDWIN;VAN HIJNINGEN, NICOLAAS CORNELIS JOSEPHUS;HUISKAMP, TOM |
发明人 |
BLOM, PAULUS PETRUS MARIA;STEVENS, ALQUIN ALPHONS ELISABETH;HUIJBREGTS, LAURENTIA JOHANNA;DE HAAN, HUGO ANTON MARIE;VAN SCHIJNDEL, ANTONIUS HUBERTUS;TE SLIGTE, EDWIN;VAN HIJNINGEN, NICOLAAS CORNELIS JOSEPHUS;HUISKAMP, TOM |
