| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve both an improvement in cutting rate and an improvement in flatness, in a tool for flattening the surface of a pad. <P>SOLUTION: In the rotating grinding tool in which a plurality of grinding units are arranged on a circular surface, the rotating grinding tool includes, on the circumference of the circular surface, a cutting portion comprising one or a plurality of sections containing a grinding unit group constituted by super-abrasives for cutting a workpiece by cutting into it, and a smoothing portion comprising one or a plurality of sections containing a grinding unit group for chipping off the workpiece loosened by the cutting operation by the cutting portion. <P>COPYRIGHT: (C)2011,JPO&INPIT |
