| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lens array, a wave front sensor and a wave front aberration measuring device, for measuring wave front aberration of a lens being a inspection target by effectively utilizing light quantity and suppressing influence of diffracted light being an error factor. <P>SOLUTION: The lens array 1 is formed by arraying many lens elements 3 adjacent to each other two-dimensionally and making minute openings 5 of the lens elements 3 orthogonal to an optical axis. The minute opening 5 of the lens element 3 has positive refractive power, and the lens element 3 is formed of a polygonal body whose outer periphery comprises three or more sides. Furthermore, at least two sides of a surface of the lens element 3 seen from an optical axis direction are curves. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
