| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum evaporator in which reduction in the temperature of a nozzle can be suppressed without adding new constitutions such as a heater and a heat insulating structure. SOLUTION: Regarding the vacuum evaporator, the inside of a vacuum vessel 11 is provided with: an evaporation source 1 composed of a crucible 2 as a vessel for heating the material 12 to be evaporated and a nozzle 3 fitted to the cover 2a of the crucible 2 and releasing the evaporated material 13 to the outside of the crucible 2; and a substrate 10 as the object for vapor deposition vapor-depositing the material 12, the nozzle 3 is composed of the part 2a projecting to the inside of the crucible 2 and the part 2b projecting to the outside of the crucible 2. COPYRIGHT: (C)2011,JPO&INPIT
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