发明名称 GRAPHITE CONE RESTRUCTURE
摘要 PURPOSE: A method for preventing a crucible from wearing out is provided to improve yield by preventing a graphite cone from being contacted with the deformed part of the crucible in an ingot growth process. CONSTITUTION: A crucible receives poly germanium melt. A graphite cone is located in the upper center of the crucible. The inner wall(101) of the graphite cone blocks heat radiated to a germanium single crystalline ingot. The outer wall(100) of the graphite cone has a space for including a radiation insulator(102). The upper side of the graphite cone is horizontally installed with the crucible not to be contacted with the deformation of the crucible.
申请公布号 KR20110095474(A) 申请公布日期 2011.08.25
申请号 KR20100014950 申请日期 2010.02.19
申请人 NEOSEMITECH CORPORATION 发明人 OH, MYUNG HWAN;LIM, CHUL KYU;AHN, HEE SEOK
分类号 C30B15/10;C30B29/08;H01L21/02 主分类号 C30B15/10
代理机构 代理人
主权项
地址