| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spatial optical modulation element which has high light reflection efficiency and is manufactured in a simple manufacturing process. <P>SOLUTION: The method of manufacturing the spatial optical modulation element includes: a step in which an electrode side substrate, on which electrodes are formed, is prepared; a step in which a movable side substrate, which includes a movable part which is moved by electrostatic force between electrodes, a reflection mirror which is tilted with the movement of the movable part and a supporting part which supports the movable part, is prepared; and a step in which the supporting part of the movable side substrate is bonded to the electrode side substrate. The step in which the movable side substrate is prepared includes: a step in which the substrate body is prepared; a step in which the movable part is formed by etching a face of the substrate body; a step in which a reflection mirror film is formed on the movable part; and a step in which the supporting part is formed by etching the other face of the substrate body. <P>COPYRIGHT: (C)2011,JPO&INPIT |
