| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a particle beam system to provide desired operation characteristics more speedily after changing a state of a beam blanker. <P>SOLUTION: The particle beam system includes: a particle beam source to form a particle beam; a high voltage power supply; a beam blanker system to have deflection plates 56, 57; and a control circuit. In the control circuit, a first current route 67 is formed between the two deflection plates 56, 57. In the first current route, sequentially from the deflection plate 56, a switch 70, a node 72 connected to the high voltage power supply, and a switch 76 are aligned in this order. In the control circuit, a second current route 85 is formed between the deflection plate 56 and the deflection plate 57. In the second current route, sequentially from the deflection plate 56, a voltage source 91, a switch 90, a series connection 88 including a node 86 connected to the high voltage power supply, and a series connection 92 to include the voltage source 95 and a switch 94 are aligned in this order. <P>COPYRIGHT: (C)2011,JPO&INPIT |
