| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor having high-corrosion resistance and high-strength, a diaphragm and manufacturing method of the diaphragm. SOLUTION: This pressure sensor 10 is provided with the diaphragm 1 that receives pressure from a measurement target fluid. The pressure sensor 10 detects the pressure of the measurement target fluid based on the deformation of the diaphragm 1. The diaphragm 1 is composed of Fe: 10 to 55 mass%, Co: 25 to 50 mass%, Cr: 5 to 27 mass%, Mo: 3 to 11 mass%, W: 0.5 to 5 mass%, Ni: 10 to 20 mass% and an alloy composed of unavoidable impurities. COPYRIGHT: (C)2011,JPO&INPIT |
