| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for mounting a carrier in a ring-shaped holder for a double-ended grinding device to obtain a workpiece having superior nano-topography as compared with conventional nano-topography with superior reproducibility, even when the double-ended grinding using a grinding wheel of a large diameter is performed. SOLUTION: This double-ended grinding device includes at least a ring-shaped holder constituted of the rotatable carrier having a projection part engaging a thin plate shaped workpiece having a cut-out part on an outer periphery to the cut-out part and holding the workpiece from the outer peripheral side along a radial direction and a holder part, and a pair of grinding wheels for simultaneously grinding both surfaces of the workpiece held by the carrier of the ring-shaped holder. This method relates to mounting of the carrier in the ring-shaped holder by the holder part in the double-ended grinding device. When mounting the carrier in the holder part, the carrier is heated and expanded, and tensile stress is applied in a direction of a center of the carrier cooled after mounted. COPYRIGHT: (C)2011,JPO&INPIT |
