| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device that suppresses the corrosion of an electrode pad. SOLUTION: The surface acoustic wave device includes a piezoelectric substrate 2, a surface acoustic wave element 4 formed on the piezoelectric substrate 2, an electrode pad 14 that is formed on the piezoelectric substrate 2, made of at least one or more metal layers, and electrically connected with the surface acoustic wave element 4, a sealing part 6 for sealing the surface acoustic wave element 4, an electrode post 8 that is formed on the electrode pad 14 to penetrate the sealing part 6 and electrically connect with the electrode pad 14, and an insulation film 12 that is located on at least one metal layer among metal layers forming the electrode pad and is formed at least under a part of the interface between the sealing part 6 and the electrode post 8. COPYRIGHT: (C)2011,JPO&INPIT |
