| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity measuring method and eccentricity measuring device performing eccentricity measurement easily and inexpensively even for aspherical lens deviated largely from spherical shape. SOLUTION: Based on a design formula of a measured lens, spherical surface approximation domain is computed (S1) which is approximated as a part of spherical surface from a vertex of the measured lens; an optical diaphragm for irradiating only spherical surface approximation domain is created (S2); an objective lens is selected (S3) corresponding to the spherical surface approximation domain, the measured lens L; the optical diaphragm and the objective lens are deployed (S4), respectively; measuring light is irradiated (S5) to the measured lens; by performing alignment of the objective lens and the measured lens, measuring light is forced to irradiate (S6) only the spherical surface approximation domain; the measured lens is rotated (S7) around an optical axis of measuring light as rotary shaft; and a value of eccentricity of optical axis of the measured lens to the rotary shaft is measured (S8) by detecting reflection light of measuring light reflected at the spherical surface approximation domain of the measured lens. COPYRIGHT: (C)2011,JPO&INPIT |
