发明名称 SOLAR CELL, METHOD FOR PRODUCING SAME, AND APPARATUS FOR PRODUCING SOLAR CELL
摘要 <p>Disclosed is a method for producing a solar cell, which comprises a step wherein an insulating film is formed on the front surface and/or back surface of a semiconductor by bringing the semiconductor into contact with nitric acid vapor that is produced by bringing nitric acid having a concentration of 60-99.9 wt% (inclusive) to a boil. By employing the production method, an insulating film that is capable of reducing surface recombination in a semiconductor surface region, namely an insulating film that is capable of inactivating a semiconductor surface can be obtained with good uniformity. As a result, the conversion efficiency of a solar cell can be remarkably increased.</p>
申请公布号 WO2011102009(A1) 申请公布日期 2011.08.25
申请号 WO2010JP62788 申请日期 2010.07.29
申请人 KOBAYASHI, HIKARU;KIT CO. LTD. 发明人 KOBAYASHI, HIKARU
分类号 H01L21/316;H01L21/336;H01L29/78;H01L29/786;H01L31/04 主分类号 H01L21/316
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