发明名称 METHOD FOR MANUFACTURING PATTERNED THIN FILM
摘要 PURPOSE: A method for manufacturing a patterned thin film substrate is provided to reduce process, time, and costs for forming an uneven pattern on the surface of a substrate. CONSTITUTION: A basic pattern structure with an embossed part and an engraved part is formed on one side of a first substrate(S21). A space layer is formed on the first substrate for obtaining a pattern(S22). A second substrate is bonded with the first substrate(S23). The first substrate is separated based on the space layer(S24).
申请公布号 KR20110095597(A) 申请公布日期 2011.08.25
申请号 KR20100015153 申请日期 2010.02.19
申请人 SAMSUNG CORNING PRECISION MATERIALS CO., LTD. 发明人 WOO, KWANG JE;YU, YULIA
分类号 H01L31/0445 主分类号 H01L31/0445
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