| 摘要 |
PROBLEM TO BE SOLVED: To suppress errors in cleavage division of a substrate by deciding a wear state of a scriber head using cheap equipment in a scribing process. SOLUTION: A scribing apparatus has a stage 100, a scriber 120, a light receiver 200, a light emitter 220, and a decision unit 240. The stage 100 mounts a substrate 10. The light emitter 220 irradiates light onto a scriber flaw 130 on the substrate 10. The light receiver 200 has a photoelectric conversion element, receives the light reflected on the substrate 10 among the light irradiated from the light emitter 220, and generates an electric signal depending on the light amount of the received light. The decision unit 240 receives the electric signal generated by the light receiver 200 to detect the light among of the reflection light, and determines the wear state of the head of the scriber 120 based on the detected value. COPYRIGHT: (C)2011,JPO&INPIT |
