| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor that is efficiently reduced in leakage current without having its relative permittivity lowered. SOLUTION: The capacitor has a multilayer thin-film laminate structure in which a lower electrode layer, a dielectric layer and an upper electrode layer are laminated in sequence, wherein a main material of the lower electrode layer is TiN or ZrN, the lower electrode layer contains oxygen, and concentration of the oxygen contained in the lower electrode layer has a range of suitable values. COPYRIGHT: (C)2011,JPO&INPIT
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