发明名称 Method of Fabricating Semiconductor Devices
摘要 Methods of fabricating a semiconductor device include alternatingly and repeatedly stacking sacrificial layers and first insulating layers on a substrate, forming an opening penetrating the sacrificial layers and the first insulating layers, and forming a spacer on a sidewall of the opening, wherein a bottom surface of the opening is free of the spacer. A semiconductor layer is formed in the opening. Related devices are also disclosed.
申请公布号 US2011207304(A1) 申请公布日期 2011.08.25
申请号 US201113030729 申请日期 2011.02.18
申请人 KIM JUNG HO;HWANG KIHYUN;YANG SANGRYOL;SANG YONG-HOON;KIM JU-EUN 发明人 KIM JUNG HO;HWANG KIHYUN;YANG SANGRYOL;SANG YONG-HOON;KIM JU-EUN
分类号 H01L21/36 主分类号 H01L21/36
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