Workpiece carrier for cleaning machine for cleaning solar wafer, has bearing portions which are arranged in such manner that to-be-replaced element is positioned outside of storage layer such that peeling of storage layer is omitted

摘要

The workpiece carrier has a specific element (300) having a contact region (310), which is connected with a to-be-replaced element (400) by an adhesive agent. A storage layer (110) is provided in the bearing portions (111-113). The bearing portions are arranged in such a manner that the to-be-replaced element, is positioned outside of storage layer such that peeling of storage layer is omitted.