| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To control sensitivity shading in a solid-state image pickup element. <P>SOLUTION: The solid-state image pickup element has an imaging area where two or more pixels are arranged on a substrate 101, wherein each pixel has a photoelectric conversion area 102 prepared on the surface part of the substrate 101 to generate electric charges by photoelectric conversion, an optical waveguide 106 prepared on the photoelectric conversion area 102 to guide incident light to the photoelectric conversion area 102, and an interlayer insulating film 105 prepared in the circumference of the optical waveguide 106 on the substrate 101. The optical waveguide 106 has a first region 106a having a refractive index higher than that of the interlayer insulating film 105. In the pixels located at least in peripheral parts of the imaging area, the optical waveguide 106 further has a second region 106b prepared in the first region 106a and having a refractive index higher than that of the first region 106a. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
