发明名称 METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO WAVE CLOCK
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibrator capable of securing the mounting strength of a piezoelectric vibrating piece in a mounting step after a cleaning step, a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio wave clock. SOLUTION: The manufacturing method has a cleaning step S40 for removing a contamination of a joining head 70 before a mounting step S50, and a dummy mounting step S45 for mounting a dummy piezoelectric vibrating piece 76 to a dummy substrate 74 having a dummy bump B2 formed thereon by using the joining head 70 after the cleaning step S40. The dummy mounting step S45 is repeated until a slipping amount Y3 of the dummy piezoelectric vibrating piece 76 into the dummy bump B2 reaches a predetermined value or larger. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011166448(A) 申请公布日期 2011.08.25
申请号 JP20100026930 申请日期 2010.02.09
申请人 SEIKO INSTRUMENTS INC 发明人 FUKUDA JUNYA
分类号 H03H3/02;H01L21/60;H03B5/32;H03H9/02 主分类号 H03H3/02
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