| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generating apparatus capable of restraining an amount of generated X-ray at an unnecessary energy zone. SOLUTION: The X-ray generating apparatus 50 includes a beam emission section 52 for emitting an electron beam B accelerated with a first linear accelerator 54, a holding section 20 for holding a thin film target T1 on a route of the electron beam B, a second linear accelerator 56 for decelerating the electron beam B after transmitting the thin film target T1, and a beam dumping section 18 for catching the decelerated electron beam B. The second linear accelerator 56 has an acceleration section 15 with an acceleration cell 15a wherein a standing wave electric field is internally formed by supplying high frequency. The acceleration section 15 has an opening 16 for externally emitting charged particles when accelerating the charged particles with the standing wave electric field, and is arranged at a position where the electron beam B after passing through the thin film target T1 from the opening 16 into the acceleration section 15 is incident. COPYRIGHT: (C)2011,JPO&INPIT |
