| 摘要 |
<p>The employment of single crystal diamonds in nano/micromachines (N/MEMS) poses difficulties, and there have been no reported successes thereof. This is because growing a single crystal diamond on an oxide that is a sacrificial layer is difficult. Conventionally, a cantilever, etc., is manufactured by means of producing polycrystals or nanodiamonds on a sacrificial oxide layer, but this resulted in insufficient mechanical performance, vibration characteristics, stability and reproducibility. The disclosed manufacturing method utilizes the fact that a high-concentration ion implantation region in a diamond substrate (101) is reformed into graphite: a reformed graphite layer (104) is removed as a sacrificial layer by electrochemical etching, and the remaining diamond layer becomes the movable structure. The produced cantilever (106) shows high frequency resonance. By means of using single crystal diamonds, mechanical performance, stability and electrical characteristics of N/MEMS devices can be improved.</p> |
