QUADRUPOLAR MASS SPECTROMETER

摘要

Disclosed is a quadrupolar mass spectrometer used to analyze the gas component within a test piece, said quadrupolar mass spectrometer being configured so that the energization and heating of a grid can be realized; the sensitivity can be prevented from decreasing to analyze the gas component at a high accuracy; and a low cost can be realized. A quadrupolar mass spectrometer (MA1) is provided with a sensor portion (M1) which can be detachably attached to a test piece (TP). If the direction that the sensor portion is attached to the test piece is defined as the upward direction, the sensor portion has a support (1) which has a predetermined shape and is provided on the bottom end of the sensor portion; an ion source (2) having a filament (22) and a grid (21) and ionizing the gas, said filament and said grid being provided on the support; a quadrupolar portion (3) provided on the ion source, wherein four columnar electrodes (31) are circumferentially arranged at predetermined intervals; and an ion detection portion (4) provided on the quadrupolar portion, said ion detection portion collecting predetermined ions passing through the quadrupolar portion by applying direct voltage and alternating voltage to opposite electrodes.