| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for rapidly manufacturing an exposure apparatus. <P>SOLUTION: In a factory manufacturing an exposure apparatus 100, a body tool is joined to a stage module 20, a moving mirror of the stage module 20 is adjusted (tilt adjustment or orthogonality adjustment) by using an optical interference meter of the body tool, and the stage module 20 is shipped to a predetermined shipping destination. A body BD installed on the shipping destination has already been adjusted (attaching position adjustment or optical axis adjustment) in advance so as to be the same state as that of the body tool concerning the optical interference meter in the manufacturing factory. Accordingly, this eliminates the necessity of newly adjusting the moving mirror of the stage module 20 in the shipment destination, and the exposure apparatus 100 can be rapidly manufactured. <P>COPYRIGHT: (C)2011,JPO&INPIT |
