| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a touch sensor device having a contact structure coming into electrical contact with a conductive transparent layer, achieving superior etching behavior, at the same time, having a good corrosion resistance and other resistance, high conductivity, a low moving resistance, and avoiding a disadvantageous effect occurring due to a stepwise change of mechanical stress in individual layers. <P>SOLUTION: The touch sensor device (10) has: an optically transparent substrate (1); one or more optically transparent touch sensor elements (4x, 4y) that are formed on the substrate (1) and have at least one conductive transparent layer (4); and one or more contact structure (2) for electrical contact of the electrically conductive transparent layer (4). The contact structure (2) has at least one Mo<SB>x</SB>Ta<SB>y</SB>layer (2) (here 0.02≤y≤0.15), which is brought into direct contact with the electrically conductive transparent layer (4). <P>COPYRIGHT: (C)2011,JPO&INPIT |
