发明名称 SURFACE ACTIVATION DEVICE
摘要 A surface activation device comprises a holding compartment, a nozzle support, and a sealing assembly. The holding compartment defines a receiving chamber and defining a plurality of recesses for holding workpieces therein. The nozzle support is rotatably received in the receiving chamber and comprises an outer barrel, an inner barrel is received in the outer barrel, and at least one ultraviolet (UV) lamp is embedded in the outer barrel. The outer barrel and the inner barrel cooperatively define a first chamber therebetween, and the inner barrel defines a second chamber therein. The sealing assembly seals the first chamber and the second chamber, and comprises at least one first inlet tube communicated with the first chamber and at least one second inlet tube communicated with the second chamber.
申请公布号 US2011203736(A1) 申请公布日期 2011.08.25
申请号 US20100790882 申请日期 2010.05.31
申请人 HON HAI PRECISION INDUSTRY CO., LTD. 发明人 PEI SHAO-KAI
分类号 H01L21/3065 主分类号 H01L21/3065
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