发明名称 POLARIZATION CONVERTING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 According to one embodiment, a polarization converting unit, for converting incident light into light in a predetermined polarization state and emitting the converted light, has a first optically rotatory member having a first thickness distribution of thicknesses in an optical-axis direction different at a plurality of locations and a second optically rotatory member having a second thickness distribution, each of which is a member to rotate linearly polarized light incident thereto as propagating light, around the optical-axis direction. The first and second optically rotatory members are comprised of an optical material with an optical activity arranged so as to have a crystal axis coincident or parallel with the optical-axis direction. Particularly, the sum of respective thicknesses of superimposed regions in the first and second optically rotatory members is different from the sum of respective thicknesses of other superimposed regions in the first and second optically rotatory members when viewed along the optical-axis direction.
申请公布号 US2011205519(A1) 申请公布日期 2011.08.25
申请号 US20100835860 申请日期 2010.07.14
申请人 NIKON CORPORATION 发明人 KANAYAMAYA NOBUMICHI;TANITSU OSAMU
分类号 G03B27/72;G02F1/29 主分类号 G03B27/72
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