发明名称 INGOT INSPECTION DEVICE AND METHOD
摘要 The present invention relates to an ingot inspection device which can accurately detect even microscopic defects by being able to obtain clear and uniform image quality when inspecting for defects inside ingots by using infrared lighting and an infrared camera, and the ingot inspection device according to the present invention comprises: infrared lighting for emitting infrared rays; an infrared camera for obtaining infrared images by capturing images of infrared rays that have passed through an ingot to be inspected; a table which is provided between the infrared lighting and the infrared camera and on which the ingot to be inspected is placed; and an enlarging member which is provided between the infrared lighting and the table and allows the infrared rays emitted from the infrared lighting to pass through while at the same time enlarging the same.
申请公布号 WO2011102622(A2) 申请公布日期 2011.08.25
申请号 WO2011KR00942 申请日期 2011.02.11
申请人 HANMISEMICONDUCTOR CO.,LTD;YOO, JEONG SOO;KO, YOUNG IL;KOO, CHANG KEUN;NOH, SANG SOO 发明人 YOO, JEONG SOO;KO, YOUNG IL;KOO, CHANG KEUN;NOH, SANG SOO
分类号 H01L21/66 主分类号 H01L21/66
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