发明名称 A METHOD FOR IMAGING WORKPIECE SURFACES AT HIGH ROBOT TRANSFER SPEEDS WITH REDUCTION OR PREVENTION OF MOTION-INDUCED DISTORTION
摘要 ? method is provided for imaging a workpiece by capturing successive frames of an elongate stationary field of view transverse to a workpiece transit path of a robot, while the workpiece is transported by the robot. The robot transit path is illuminated with an elongate illumination pattern transverse to the transit path to obtain a workpiece image of successive frames. Motion-induced image distortion is prevented or reduced adjusting the camera frame rate in real time in proportion to changes in robot velocity profile of the workpiece along the transit path.
申请公布号 WO2011102938(A2) 申请公布日期 2011.08.25
申请号 WO2011US22031 申请日期 2011.01.21
申请人 APPLIED MATERIALS, INC.;RAVID, ABRAHAM;EGAN, TODD;LINGEL, KAREN 发明人 RAVID, ABRAHAM;EGAN, TODD;LINGEL, KAREN
分类号 H01L21/68;B25J13/08;G01B11/04;H01L21/677 主分类号 H01L21/68
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