ELECTRIC RESISTANCE HEATING ELEMENT AND ELECTRODE BONDING DEVICE OF LARGE CALIBER GAAS SINGLE CRYSTAL GROWTH

摘要

PURPOSE: An electric resistance heater for growing a GaAs single crystal with a large diameter and an electrode rod combining device are provided to increase electric efficiency by maintaining a space between a heater and an electrode rod. CONSTITUTION: Gallium arsenide solutions and boron oxide are received in a reaction container. A graphite heater(6) heats the reaction container. A heat blocker prevents heat from the graphite heater to the outside. A graphite connection unit(11) is mounted on the upper side of an electrode rod(12) using a tap. The electrode rod supplies electricity from the outside of a chamber. The graphite connection unit connects and supports the electrode rod and the heater.