发明名称 |
THE APPARATUS AGAINST DEFORMING THE QUARTZ CRUCIBLE IN THE SINGLE CRYSTAL GROWTH |
摘要 |
PURPOSE: An apparatus for preventing the deformation of a crucible is provided to prevent the deformation of the upper side of a crucible due to radiation heat from a heater by fitting a ring-shaped graphite structure to the upper side of a three divided graphite crucible. CONSTITUTION: A crucible is fixed with a three divided graphite crucible(101). A graphite ring(102) is mounted to prevent the deformation of the crucible at a high temperature. The graphite ring is mounted in the groove of the three divided graphite crucible. The thickness of the graphite ring is 0.8 mm. The height of the graphite ring is 8 cm.
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申请公布号 |
KR20110095599(A) |
申请公布日期 |
2011.08.25 |
申请号 |
KR20100015157 |
申请日期 |
2010.02.19 |
申请人 |
NEOSEMITECH CORPORATION |
发明人 |
PARK, SUNG JOON;NAM, HYUN SEOK;LIM, CHUL KYU;OH, MYUNG HWAN |
分类号 |
C30B15/10;C30B15/04;C30B29/08;H01L21/02 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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