| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical waveguide element which will not peel off a substrate, in the case of formation of a thick electrode for modulation and make a modulation frequency wide-band to quickly perform modulation. SOLUTION: A signal electrode 4 and ground electrode 5-1 and 5-2, which modulate an optical waveguided in optical waveguides 2-1 and 2-2, are constituted in a periodic multilayered structure where a metal layer and a dielectric layer are alternately laminated in a direction perpendicular to a principal face 1A of a substrate 1, on the substrate 1 having electrooptic effects.</p> |
