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发明名称
Integrated circuit arrangement with low-resistance contacts and method for production thereof
摘要
申请公布号
EP2230684(A3)
申请公布日期
2011.08.24
申请号
EP20100168883
申请日期
2004.06.02
申请人
INFINEON TECHNOLOGIES AG
发明人
HOFMANN, FRANZ;LUYKEN, RICHARD JOHANNES;ROESNER, WOLFGANG;SPECHT, MICHAEL
分类号
H01L21/285;H01L21/60;H01L29/417
主分类号
H01L21/285
代理机构
代理人
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