| 摘要 |
PROBLEM TO BE SOLVED: To ensure a sufficiently large value as much as a glassy bulk for an insulation between electrodes by unifying a glassy insulating layer and a glassy base, and to exhibit an enough large gradient force by performing a detailed groove processing to the glassy insulating layer or the glassy base and by carrying out an electrode formation to narrow an electrode interval. SOLUTION: This invention relates to a method of manufacturing a glassy electrostatic chuck equipped with at least more than one pair of electrodes between the glassy insulating layer and the glassy base, characterized by including the steps of: processing a groove into a glassy raw material board used as the glassy insulating layer; arranging the electrodes into the groove; bonding the glassy raw material board and the glassy base so that the electrodes may be provided thereamong; and polishing a front surface of the glassy raw material board to make the glassy insulating layer with a desired thickness. COPYRIGHT: (C)2009,JPO&INPIT |
