发明名称 SEMICONDUCTOR WASTEWATER TREATMENT PLANT AND PROCESSING SYSTEM
摘要 PURPOSE: A semiconductor wastewater treatment plant is provided to reduce time loss and maintenance costs in exchanging a filter by removing minute particles collected in a filter to recycle the filter. CONSTITUTION: In a semiconductor wastewater treatment plant, a storage tank(10) stores waste water. The waste water stored in the storage tank is pumped by a pump to be supplied to a coarsening device. The coarsening unit makes the minute particles in the waste water coarse. The coarsening unit is comprised of an electrostatic processing unit(21) having an electrode plate and a mixing unit having a mixed rod(25). A cyclone separator(30) collects the coarsened particles and minute particles and discharges a fluid with the minute particles removed.
申请公布号 KR20110094808(A) 申请公布日期 2011.08.24
申请号 KR20100014431 申请日期 2010.02.18
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 KIM, YONG JIN;HAN, BANG WOO;KIM, HAK JOON;HONG, WON SUK;SHIN, WAN HO;JEONG, SANG HEYN;SONG, DONG KEUN
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址