ATOMIC FORCE MICROSCOPIC AND SPECIMEN MEASURING METHOD USING THE SAME

摘要

PURPOSE: An atomic force microscope and sample measurement method using the same are provided to accurately measure the 3D shape of a sample by scanning the sample through a probe and using a long stroke scanner and a short stroke scanner. CONSTITUTION: A sample is transferred to a stage. A probe(10A) is attached to one or more cantilevers(10). The cantilever changes a driving displacement and a driving frequency. The cantilever is attached to one or more short stroke scanners(200). The short stroke scanner short-stroke scans the sample. The short stroke scanner is attached to one or more long stroke scanners(300). The long stroke scanner long-stroke scans the sample.