发明名称 |
MICRO-ELECTROMECHANICAL RESONATORS HAVING ELECTRICALLY-TRIMMED RESONATOR BODIES THEREIN AND METHODS OF FABRICATING SAME USING JOULE HEATING |
摘要 |
A micro-electromechanical resonator includes a resonator body having a semiconductor region therein doped with boron to a level greater than about 1×1018 cm−3 and even greater than about 1×1019 cm−3, in order to obtain reductions in the temperature coefficient of frequency (TCF) of the resonator over a relatively large temperature range. Still further improvements in TCF can be achieved by degenerately doping the resonator body with boron and/or by boron-assisted aluminum doping of the resonator body. |
申请公布号 |
EP2359475(A2) |
申请公布日期 |
2011.08.24 |
申请号 |
EP20090812512 |
申请日期 |
2009.11.23 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
AYAZI, FARROKH;SAMARAO, ASHWIN |
分类号 |
H03H3/007;H03H3/04;H03H7/00;H03H9/24;H03H9/46 |
主分类号 |
H03H3/007 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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